Probe Unit
<Blade type Probe Unit>
- • Min. Pitch 30um
- • Accuracy X±5um, Y/Z ±10um
- • Probe Life Time 300K TD
- • Scrub range 30um
<Film type Probe Unit>
- • Min. Pitch 11um(Triple staggered Pad)
- • Accuracy X/Y ±5um, Z ±1um
- • Probe Life Time 100K TD
- • Scrub range 15um