Semiconductor Equipment Division

Saw Filter Etcher conducts metal etch which is the most critical process in fabricating saw filter and oxide etch. It keeps stable and low process temperature and minimizes damage on surface of target material when it conducts etching to yield high-quality saw filter.

NeoGEN-MAXIS™200L/RADIION200

• 4-6 inch saw filter substrate
(piezielectric material)

• ICP Etcher & remote plasma asher in-
line system

• Special ESC

• EDA

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